کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7133989 1461832 2017 14 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Design and test of a micromachined resonant accelerometer with high scale factor and low noise
ترجمه فارسی عنوان
طراحی و آزمایش شتاب سنج رزونانس میکرو با کیفیت بالا و نویز کم
کلمات کلیدی
شتاب سنج رزونانس، مقیاس عامل، سر و صدا، دامنه ارتعاش، ارتعاش غیر خطی، اندازه گیری فرکانس،
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
چکیده انگلیسی
This paper describes the design, fabrication and experimental evaluation of a silicon micromachined resonant accelerometer that demonstrates high sensitivity and low noise. The device is fabricated with the silicon-on-glass micromachining technology and vacuum packaged to permit the double-ended-tuning-fork resonators operated at extremely high quality factor, up to 3.5 × 105. Structure optimization of the one-stage micro-lever, resonator and bearing beam is discussed to produce a high scale factor of 221.67 Hz/g, which is confirmed by the measured value of 244.15 Hz/g at a full scale range of ±15 g. Various frequency noise sources are modeled and discussed to explain the acceleration measurement noise associated with the vibration amplitude of the resonator and further optimize the drive voltage. By setting an optimized drive voltage at 10 mV, the measured noise and resolution of the MRA prototype are 0.38 μg/Hz and 0.63 μg, respectively. Compared to other reported MRAs, this accelerometer benefits from the optimization of the device geometry dimensions and the applied drive voltage, which exhibits both high scale factor and low noise.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 268, 1 December 2017, Pages 52-60
نویسندگان
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