کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7134793 1461856 2016 20 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
High frequency surface acoustic wave resonator-based sensor for particulate matter detection
ترجمه فارسی عنوان
سنسور مبتنی بر رزوناتور سطح موج فرکانس بالا برای تشخیص مواد ذرات
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
چکیده انگلیسی
This paper describes the characterization of high frequency Surface Acoustic Wave Resonator based (SAWR) sensors, for the detection of micron and sub-micron sized particles. The sensor comprises two 262 MHz ST-cut quartz based Rayleigh wave SAWRs where one is used for particle detection and the other as reference. Electro-acoustic detection of different sized particles shows a strong relationship between mass sensitivity (Δf/Δm) and particle diameter (Dp). This enables frequency-dependent SAWR sensitivity to be tailored to the size of particles, thus making these types of sensors good candidates for PM10, PM2.5 and ultrafine particle (UFP) sensing. Our initial characterisation demonstrated a typical SAWR frequency shift of 60 Hz in response to a deposition of ca. 0.21 ng of 0.75 μm-sized gold particles (∼50 particles) on the sensor surface. Sensor responses to different sized particles, such as ∼30 μm diameter silicon, gold (diameters of ∼0.75 μm and ∼20 μm), ∼8 μm fine sugar, PTFE (∼1 μm and ∼15 μm), ∼4 μm talcum powder, and ∼2 μm molybdenum powder were evaluated, and an average mass sensitivity of 275 Hz/ng was obtained. Based on the results obtained in this study we believe that acoustic wave technology has great potential for application in airborne particle detection. Moreover, acoustic resonator devices can be integrated with CMOS interface circuitry to obtain sensitive, robust, low-power and low-cost particle detectors for a variety of applications including outdoor environmental monitoring.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 244, 15 June 2016, Pages 138-145
نویسندگان
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