کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7134793 | 1461856 | 2016 | 20 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
High frequency surface acoustic wave resonator-based sensor for particulate matter detection
ترجمه فارسی عنوان
سنسور مبتنی بر رزوناتور سطح موج فرکانس بالا برای تشخیص مواد ذرات
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
This paper describes the characterization of high frequency Surface Acoustic Wave Resonator based (SAWR) sensors, for the detection of micron and sub-micron sized particles. The sensor comprises two 262 MHz ST-cut quartz based Rayleigh wave SAWRs where one is used for particle detection and the other as reference. Electro-acoustic detection of different sized particles shows a strong relationship between mass sensitivity (Îf/Îm) and particle diameter (Dp). This enables frequency-dependent SAWR sensitivity to be tailored to the size of particles, thus making these types of sensors good candidates for PM10, PM2.5 and ultrafine particle (UFP) sensing. Our initial characterisation demonstrated a typical SAWR frequency shift of 60 Hz in response to a deposition of ca. 0.21 ng of 0.75 μm-sized gold particles (â¼50 particles) on the sensor surface. Sensor responses to different sized particles, such as â¼30 μm diameter silicon, gold (diameters of â¼0.75 μm and â¼20 μm), â¼8 μm fine sugar, PTFE (â¼1 μm and â¼15 μm), â¼4 μm talcum powder, and â¼2 μm molybdenum powder were evaluated, and an average mass sensitivity of 275 Hz/ng was obtained. Based on the results obtained in this study we believe that acoustic wave technology has great potential for application in airborne particle detection. Moreover, acoustic resonator devices can be integrated with CMOS interface circuitry to obtain sensitive, robust, low-power and low-cost particle detectors for a variety of applications including outdoor environmental monitoring.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 244, 15 June 2016, Pages 138-145
Journal: Sensors and Actuators A: Physical - Volume 244, 15 June 2016, Pages 138-145
نویسندگان
Sanju Thomas, Marina Cole, Farah H. Villa-López, Julian W. Gardner,