کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7134868 | 1461856 | 2016 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A real time error measuring device for meso-scale machine tools
ترجمه فارسی عنوان
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
This paper describes the development of a real time error measuring device for the simultaneous measurement of movement errors in straightness, yaw and roll in a linear machine stage. It was designed specifically for measuring errors in the spatial positioning of meso-scale machine tool stages. The arrangement of the optical path and design of the optical elements make it easy install the device on a linear stage. Roll, yaw and horizontal straightness error motions are sensed using the reflection of a laser beam from a plane mirror. A nonlinear measurement model was derived and simulation analysis showed this could be linearized when the measurement angle error was smaller than 0.05°. The measurement ranges of the proposed system are ±30Ⳡfor θx, ±20Ⳡfor θy and ±30 μm for the z-axis. The measurement precision was verified using a laser interferometer and an electronic level and the accuracy of the angular error and straightness error measurements were found to be in the range of ±0.25Ⳡand ±0.5 μm respectively. The extended measurement uncertainties (95% confidence level) were: 0.46Ⳡfor θx error motion; 0.46Ⳡfor θy error motion; and 0.616 μm for straightness.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 244, 15 June 2016, Pages 213-222
Journal: Sensors and Actuators A: Physical - Volume 244, 15 June 2016, Pages 213-222
نویسندگان
Hau-Wei Lee, Kuo-Yi Huang, Huan-Tsai Peng, Chien-Hung Liu,