Shape memory alloy thin films and heterostructures for MEMS applications: A review

In recent years, shape memory alloy (SMA) thin films have attracted significant attention from the scientific community and industry for their potential applications in the field of smart sensors and actuators, micro- and nano-electromechanical systems, aerospace, automobile, and biomedical. The present article focuses on the recent developments in the field of SMA thin films and their heterostructures with other materials for potential microelectromechanical systems (MEMS) applications. Various microdevices such as microgrippers, micropumps, microvalves, and cantilevers fabricated from binary and ternary SMA films have been discussed in detail. SMA thin films combined with various nitrides, oxides, and ferroelectric layers offer excellent surface modification and vibration damping at microscale for their use in harsh environments. The article encompasses the new paradigms in the field of SMA thin films that have been essentially developed by the authors and co-workers during the past 6 years.