کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7135194 1461861 2016 40 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators
چکیده انگلیسی
The paper reports on the fabrication and characterization of high-resolution strain sensors for structural materials based on Silicon On Insulator flexural resonators manufactured by polysilicon Low-Pressure Chemical Vapour Deposition vacuum packaging. The sensors present sensitivity of 164 Hz/με and strain resolution limit of 150 pε on steel for a measurement time of 315 ms, in both tensile and compressive strain regimes. The readout of the sensor is implemented with a transimpedance oscillator circuit implemented on Printed Circuit Board, in which a microcontroller-based reciprocal frequency counter is integrated. The performance of the sensors on steel are investigated for measurement bandwidths from 1.5 to 500 Hz and a comparison with conventional metal strain gauges is proposed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 239, 1 March 2016, Pages 90-101
نویسندگان
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