کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7135301 1461862 2016 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Simultaneous interrogation of high-Q modes in a piezoelectric-on-silicon micromechanical resonator
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Simultaneous interrogation of high-Q modes in a piezoelectric-on-silicon micromechanical resonator
چکیده انگلیسی
A piezoelectric-on-silicon micromachined square plate resonator for the simultaneous excitation of three bulk acoustic wave modes lying within a frequency span of 2.84-3.2 MHz is reported. Three resonant modes are electrically interrogated in this frequency span, with two bulk acoustic wave mode types (Square-extensional and Lamé) well-established for this system while the third is a higher frequency mode which has not been addressed before via capacitive or piezoelectric actuation schemes. This mode was found to have a high quality factor, similar temperature co-efficient of frequency and a comparable thin-film mass sensitivity as compared to the other modes. An electrode/transducer configuration to enable selective actuation and/or suppression of the actuated in-plane modes is also reported.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 238, 1 February 2016, Pages 207-214
نویسندگان
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