کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7135356 1461862 2016 25 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Capacitive inertial sensing at high temperatures of up to 400 °C
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Capacitive inertial sensing at high temperatures of up to 400 °C
چکیده انگلیسی
High-temperature-resistant inertial sensors are increasingly requested in a variety of fields such as aerospace, automotive and energy. Capacitive detection is especially suitable for sensing at high temperatures due to its low intrinsic temperature dependence. In this paper, we present high-temperature measurements utilizing a capacitive accelerometer, thereby proving the feasibility of capacitive detection at temperatures of up to 400 °C. We describe the observed characteristics as the temperature is increased and propose an explanation of the physical mechanisms causing the temperature dependence of the sensor, which mainly involve the temperature dependence of the Young's modulus and of the viscosity and the pressure of the gas inside the sensor cavity. Therefore a static electromechanical model and a dynamic model that takes into account squeeze film damping were developed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 238, 1 February 2016, Pages 361-368
نویسندگان
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