Dynamic analysis and application of a novel hydraulic displacement amplifier based on flexible pistons for micro stage actuator

An appropriate displacement amplification mechanism is crucial to enhance the performance of a micro stage actuator and extend its application fields. This paper concerns the dynamic analysis of a novel hydraulic displacement amplifier: its specific flexible pistons are analyzed based on elastic small deflection theory and modal analysis; a mechanical governing equation for the hydro-mechanical coupled model of overall hydraulic amplifier is built based on hydraulic stiffness theory and analyzed using increment harmonic balance (IHB) method. The theoretical analysis is verified by simulation and the performance of the novel hydraulic amplifier is verified by a series of practical tests.