کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7135767 | 1461867 | 2015 | 11 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper reports a non-resonant 2-D piezoelectric MEMS scanner actuated by a Nb doped PZT (PNZT) thin film for endoscopic optical coherence tomography (E-OCT) application. The unimorph actuator with the PNZT film shows more than twice as large displacement as that with a non-doped PZT films, and is suitable for large angle non-resonance scan, which was difficult for conventional non-resonant piezoelectric scanners. We designed a gimbal-less scanner with folded L-shape actuators enabling two-axis scan motion of a 1 mm Ã 1 mm mirror within a compact device size of 2.2 mm Ã 2.7 mm. The fabricated MEMS scanner with PNZT actuators showed an optical scan angle of 18.6° for both scan axes at a drive voltage of 40 Vpp in non-resonance mode. This scan angle is more than 1.7 times larger than that of the scanner with PZT actuators, and is high enough to achieve a clinically useful scan area of 1 mm Ã 0.7 mm at 3 mm working distance in a side-imaging probe. The resonance frequency of the scanner was greater than 1.37 kHz, which was sufficiently high for non-sinusoidal actuation up to 50 Hz in OCT imaging. The scanner was driven by 25 Hz triangle waves and 50 Hz sawtooth waves through a low pass filter for linear OCT imaging at 50 lines per second.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 233, 1 September 2015, Pages 147-157
Journal: Sensors and Actuators A: Physical - Volume 233, 1 September 2015, Pages 147-157
نویسندگان
Takayuki Naono, Takamichi Fujii, Masayoshi Esashi, Shuji Tanaka,