کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7136162 | 1461877 | 2015 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Miniature silicon Michelson interferometer characterization for dimensional metrology
ترجمه فارسی عنوان
مشخصات سیلیکون مینیاتور میکروفون برای سنجش ابعاد بعدی
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
Dimensional metrology applications require performing measurements of profile and form/shape of parts at a nanometer-level of accuracy. Therefore, the metrological characteristics of a miniature optical micro-probe based on a Michelson interferometer are evaluated. The optical micro-probe is designed to perform dimensional measurements with a target uncertainty in the order of few nanometers. Two micro-probe designs having reflection-transmission ratios of 75-25% and 25-75%, are characterized. Two optical setups have been implemented as well: firstly, using a single laser diode with a 1550.3Â nm wavelength and secondly using a tunable laser source in the C-L bands. The characterization of the two micro-probes is performed using a new ultra-precise test bench, with respect to both dissociated metrology structure and Abbe principles. The experiments allow the evaluation of the error sources such as: stability, axial motion errors (residual errors), material dependence, tilt angle and roughness of the tested object. The experimental results revealed that dimensional measurements could be achieved with nanometer-scale errors, ranging from 2Â nm to 15Â nm, depending on the probe design and the reflectance of the device under test.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 223, 1 March 2015, Pages 141-150
Journal: Sensors and Actuators A: Physical - Volume 223, 1 March 2015, Pages 141-150
نویسندگان
Hichem Nouira, Jean-Pierre Wallerand, Maurine Malak, Anne-Françoise Obaton, José Salgado, Tarik Bourouina,