A MEMS linear accelerator for levitated micro-objects

In this work, the design, micro-fabrication, and characterization steps of a contactless linear accelerator is presented. The proposed design in principle can levitate conductive micro-objects and accelerate or move them over a predefined trajectory. The levitation is realized using electromagnetic induction generated by a changing AC field whereas the propulsion is achieved through electrostatic forces from a controlled DC source. This is the first time in literature that such a hybrid design is used to accomplish this idea. It has been experimentally shown that the proposed design can levitate 1 mm × 1 mm sized and 7 μm thick micro-objects to a maximum height of 75 μm and propel them forward continuously at a maximum average forward velocity of 3.6 mm/s.