کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7136864 | 1461880 | 2014 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
3D micro-machined inductive contactless suspension: Testing and modeling
ترجمه فارسی عنوان
تعلیق بدون تماس با مودم سه بعدی میکرو ماشین: آزمایش و مدل سازی
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
We present herewith detailed theoretical modeling coupled with experimental analysis of a micromachined inductive suspension (MIS). The reported MIS is based on two coaxial 3D solenoidal microcoils realized using our wirebonding technology. The two coils are excited using an AC signal with 180° phase-shift and a conductive proof mass (PM) is stably levitated on top of the coils. Using a micromechanical displacement sensor, we experimentally derive the lateral, vertical and angular stiffness constants of our MIS. Based on the analytical model presented here, we discuss the stability of the levitated proof mass as a function of the geometrical parameters of the design. We further test our model by applying it to another previously reported MIS structure realized using planar technology, providing stability diagrams as well as design guidelines for further developments of the micromachined inductive suspension as, for instance, miniature rotating gyroscopes.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 220, 1 December 2014, Pages 134-143
Journal: Sensors and Actuators A: Physical - Volume 220, 1 December 2014, Pages 134-143
نویسندگان
Zhiqiu Lu, Kirill Poletkin, Bartjan den Hartogh, Ulrike Wallrabe, Vlad Badilita,