کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7137542 | 1461895 | 2014 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Development of high performance piezoelectric d33 mode MEMS vibration energy harvester based on PMN-PT single crystal thick film
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Development of high performance piezoelectric d33 mode MEMS vibration energy harvester based on PMN-PT single crystal thick film Development of high performance piezoelectric d33 mode MEMS vibration energy harvester based on PMN-PT single crystal thick film](/preview/png/7137542.png)
چکیده انگلیسی
In this paper, we present the development of the d33 mode piezoelectric MEMS energy harvester, which is made of composite cantilever beams from single crystal PMN-PT thick film, and silicon layer. The PMN-PT piezoelectric thick film is deployed to improve the coupling coefficient and electromechanical coefficient. The d33 mode harvester based on interdigital electrodes contributes to improve its energy conversion efficiency. The hybrid processes composed of wafer bonding and mechanical lapping for thinning is successfully developed to prepare the PMN-PT thick film. The experimental results show that the fabricated prototype excited at 1.5 g vibration level can generate a maximum output voltage of 5.36 VP-P and corresponding power of 7.182 μW at the resonant frequency of 406.0 Hz. The power density is calculated as 17,181.8 μW cmâ3, which is superior to the devices fabricated by other technologies in the reported literature.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 205, 1 January 2014, Pages 150-155
Journal: Sensors and Actuators A: Physical - Volume 205, 1 January 2014, Pages 150-155
نویسندگان
Gang Tang, Bin Yang, Jing-quan Liu, Bin Xu, Hong-ying Zhu, Chun-sheng Yang,