کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7137614 1461899 2013 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Heated atomic force microscope cantilever with high resistivity for improved temperature sensitivity
ترجمه فارسی عنوان
برای تقویت حساسیت به درجه حرارت با مقاومت بالا مقاومت میکروسکوپ نیروی اتمی گرم شده است
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
چکیده انگلیسی
We report a heated atomic force microscope cantilever with a heater region engineered to have high temperature sensitivity. The high resistivity (HR) heater region is phosphorous-doped silicon with a doping concentration of 1 × 1016 cm−3 and a resistivity of 0.53 Ω-cm. The heater has a temperature coefficient of resistance of 102 Ω C−1 over the temperature range 100-300 °C, which is more than one order magnitude higher compared to heated cantilevers from previous publications. When used for thermal sensing of substrate nanotopography, the HR cantilever has a sensitivity of 0.37 mV/nm at 300 °C. Because the HR cantilever has high sensitivity at relatively low temperatures, it can be used to measure substrates that cannot withstand high temperatures, demonstrated here as a polymer film grating of thickness 110 nm.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 201, 15 October 2013, Pages 141-147
نویسندگان
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