Microfabrication of dielectric barrier discharge plasma actuators for flow control

Dielectric barrier discharge (DBD) plasma actuators are a popular type of actuator used in active flow control. However, their performance and broader application are restricted by the manufacturing methods currently employed. A methodology is proposed, with an emphasis on material durability when exposed to plasma, to build more robust plasma actuators, which takes advantage of microfabrication techniques. Thin film electrodes are precisely deposited onto alkali free borosilicate glass substrates, which resist degradation in the presence of plasma, resulting in the batch construction of repeatable actuators with consistent physical and operational properties. The robustness of different electrode materials to the plasma environment is considered via SEM images, EDX elemental analysis and through the homogeneity of the plasma formation.