Optimization of a micro Coriolis mass flow sensor using Lorentz force actuation

► A micro Coriolis mass flow sensor can be actuated using Lorentz force. ► Using Finite Element models, the quality of the actuation can be investigated. ► Using miniature magnets, the Lorentz force for actuation can be increased significantly compared to the previously used situation. ► The Lorentz force actuation is insensitive to misalignment of the magnets.