An array of 100 μm × 100 μm dielectric elastomer actuators with 80% strain for tissue engineering applications

► Fabrication and characterization of an array of 100 μm × 100 μm dielectric elastomer actuators, generating up to 80% in-plain strain. ► Presenting an effective method to pattern 100 μm wide compliant electrodes by low energy ion implantation, addressing the lack of suitable fabrication techniques to pattern μm scale compliant electrodes on silicone membranes. ► Fabrication of two layer actuators showing up to 37% strain for cell stretching applications to allow high throughput mechanotransduction studies in single cell level.