کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7141388 1462031 2018 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching
چکیده انگلیسی
We propose a high-performance porous metal-insulator-metal-type capacitive humidity sensor based on a functional polymer mixed with TiO2 microparticles subjected to inductively coupled plasma (ICP) and reactive-ion etching (RIE) treatments. The humidity sensor is composed of a porous top electrode, a TiO2-containing functional polymer humidity-sensitive layer subjected to two types of oxygen plasma treatment, a bottom electrode, and a glass substrate. The initial O2 ICP dry-etching utilizes higher intensity plasma for deep etching in the inlet holes on the top electrode to increase the contact area and shorten the vapor absorption path, thereby yielding high sensitivity and low hysteresis. Further, the RIE treatment leads to roughening of the polymer etching surface and further improving the performance of the humidity sensor. The functional polymer mixed with TiO2 microparticles exhibits excellent hysteresis over a wide humidity sensing range. The fabricated sensors are tested at various relative humidity (RH) values, achieving an ultra-low hysteresis of 0.64% RH at 60% RH, a high sensitivity of 1.24 pF/% RH, a fast response time of less than 25 s, good temperature dependence, and a stable capacitance value with a maximum error rate of 0.15% over 120 h of continuous testing.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 258, 1 April 2018, Pages 704-714
نویسندگان
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