کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7141388 | 1462031 | 2018 | 11 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We propose a high-performance porous metal-insulator-metal-type capacitive humidity sensor based on a functional polymer mixed with TiO2 microparticles subjected to inductively coupled plasma (ICP) and reactive-ion etching (RIE) treatments. The humidity sensor is composed of a porous top electrode, a TiO2-containing functional polymer humidity-sensitive layer subjected to two types of oxygen plasma treatment, a bottom electrode, and a glass substrate. The initial O2 ICP dry-etching utilizes higher intensity plasma for deep etching in the inlet holes on the top electrode to increase the contact area and shorten the vapor absorption path, thereby yielding high sensitivity and low hysteresis. Further, the RIE treatment leads to roughening of the polymer etching surface and further improving the performance of the humidity sensor. The functional polymer mixed with TiO2 microparticles exhibits excellent hysteresis over a wide humidity sensing range. The fabricated sensors are tested at various relative humidity (RH) values, achieving an ultra-low hysteresis of 0.64% RH at 60% RH, a high sensitivity of 1.24Â pF/% RH, a fast response time of less than 25Â s, good temperature dependence, and a stable capacitance value with a maximum error rate of 0.15% over 120Â h of continuous testing.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 258, 1 April 2018, Pages 704-714
Journal: Sensors and Actuators B: Chemical - Volume 258, 1 April 2018, Pages 704-714
نویسندگان
Tian Qiang, Cong Wang, Ming-Qing Liu, Kishor Kumar Adhikari, Jun-Ge Liang, Lei Wang, Yang Li, Yu-Ming Wu, Guo-Hui Yang, Fan-Yi Meng, Jia-Hui Fu, Qun Wu, Nam-Young Kim, Zhao Yao,