کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7146507 | 1462089 | 2014 | 35 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Ammonia gas sensors based on ZnO/SiO2 bi-layer nanofilms on ST-cut quartz surface acoustic wave devices
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Ammonia gas sensors based on ZnO/SiO2 bi-layer nanofilms on ST-cut quartz surface acoustic wave devices Ammonia gas sensors based on ZnO/SiO2 bi-layer nanofilms on ST-cut quartz surface acoustic wave devices](/preview/png/7146507.png)
چکیده انگلیسی
Surface acoustic wave (SAW) ammonia gas sensors based on ZnO/SiO2 bi-layer nanofilms on ST-cut quartz surface acoustic wave devices were fabricated and characterized. The ZnO and SiO2 layers were coated onto SAW resonators by combining a sol-gel process and a spin-coating technique. The SEM and AFM results revealed the ZnO/SiO2 bi-layer films had porous structures. The gas sensing results showed that the sensitivity of sensors was dependent on the value of sheet conductivity of the sensing films. As a result, the bi-layer nanofilms were much more sensitive than the single layer films due to their appropriate sheet conductivity, and the absolute response value was dependent on the thickness of the top ZnO layer. The sensor based on the bi-layer nanofilm with 60Â nm top ZnO layer showed the best gas sensing property. It exhibited a frequency shift of 2000Â Hz in 30Â ppm ammonia gas with good repeatability and stability.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 201, 1 October 2014, Pages 114-121
Journal: Sensors and Actuators B: Chemical - Volume 201, 1 October 2014, Pages 114-121
نویسندگان
Yong-Liang Tang, Zhi-Jie Li, Jin-Yi Ma, Yuan-Jun Guo, Yong-Qing Fu, Xiao-Tao Zu,