Semipacked columns with atomic layer-deposited alumina as a stationary phase

- Atomic layer-deposited alumina was utilized as a stationary phase for the first time for MEMS-based semi-packed columns.
- Silane-treated alumina afforded excellent separation performance.
- The newly developed stationary phase was found to be stable after multiple injections and at high operating temperatures. Moreover, it has shown the ability to separate aromatic hydrocarbons.