Model-Based State-Space Control of Hybrid Micropositioning Systems

The design of an efficient control, which provides at the same time a straightforward real-time implementation possibility, is from essential importance in many industrial applications. This is particularly true for the wide spectrum of nanopositioning tasks, where in many cases centimetre-range trajectories with maximal positioning error held in the nanometre range has to be followed. In this paper a model-based state-space control design approach for hybrid micropositioning systems, capable to fulfil both imposed requirements, is presented. The described control concepts are implemented on a digital real-time system and experimentally verified with a commercial available hybrid micropositioning stage.