Vibration Suppression GUI Tool based Input Shaping Control and Its Applications to Industrial Processes

This paper proposes a vibration suppression tool with visual graphical interface to solve the vibration problem based on input shaping approach. The vibratory model was identified and the preshaped input was generated using the tool. The proposed tool was then applied in real industry processes such as semiconductor wafer transfer robot and gantry loader to solve the vibration problems in high speed operation and good results were obtained that confirm the validity of the tool.