Fracture of Silicon: Influence of rate, positioning accuracy, FIB machining, and elevated temperatures on toughness measured by pillar indentation splitting

Fracture of Silicon: Influence of rate, positioning accuracy, FIB machining, and elevated temperatures on toughness measured by pillar indentation splitting

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials & Design - Volume 142, 15 March 2018, Pages 340-349

C.M. Lauener, L. Petho, M. Chen, Y. Xiao, J. Michler, J.M. Wheeler,