Optimization of spray parameters in the fabrication of SnO2 layers using electrostatic assisted deposition technique

Tin oxide (SnO2) thin films for gas sensing applications were prepared using electrostatic spray deposition method under optimum deposition conditions. It is shown in the paper that desired film morphology can be obtained by controlling different spray parameters (liquid properties, applied voltage, nozzle-substrate distance and substrate temperature). The spray parameters were optimized with respect to droplet diameter and applied voltage. An empirical relationship between critical voltage and different spray parameters was established for optimization. The morphology of the films prepared using these optimized spray parameters were investigated using X-Ray Diffraction (XRD) and Scanning Electron Microscope (SEM).

► Electrostatic spray in cone jet mode used for SnO2 film deposition.
► Spray parameters optimized to control the film quality for gas sensing application.
► Sensitive films deposited under optimized conditions.
► Films characterized using XRD and SEM.