Optimal design of a 1-rotational DOF flexure joint for a 3-DOF H-type stage

A 3-DOF H-type stage using a flexure joint to accomplish rotational motion about the Z axis of a gantry stage is presented. To employ the rotational motion about the Z axis in an H-type stage, a 1-rotational DOF flexure joint is proposed. The proposed flexure joint in the H-type stage has high off-axis stiffness and adequate durability against high thrust force. A 6-DOF stiffness equation of the proposed flexure joint is obtained by analysis of leaf spring stiffness. To satisfy the required stage dynamic performance, the optimal design is executed on the geometric parameters of the proposed flexure joint using Sequential Quadratic Programing. The results of the optimal design are verified by experiment on the actual flexure joint.