کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
731479 893066 2010 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Nano-positioning of an electromagnetic scanner with a MEMS capacitive sensor
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی کنترل و سیستم های مهندسی
پیش نمایش صفحه اول مقاله
Nano-positioning of an electromagnetic scanner with a MEMS capacitive sensor
چکیده انگلیسی

This paper presents the control design and experimentation of a prototype electromagnetic X/Y scanner for small form factor probe storage. An array of probe heads is to be precisely positioned in tracking, scanning and rotation directions so that high areal density (>1 terabit/in2) and high data throughput can be achieved. The scanner has X/Y motion capabilities with a linear stroke of about 300μm. It can also generate rotational motion with offset actuators to compensate for disturbances, mechanical tolerance and nonlinearities. System characterization, modeling, MIMO control design and simulation, and preliminary experimental results are presented. The feasibility of rotation control with the capacitive sensor and offset actuators is experimentally confirmed.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Mechatronics - Volume 20, Issue 1, February 2010, Pages 27–34
نویسندگان
, , , , ,