Robust adaptive tracking control of uncertain electrostatic micro-actuators with H-infinity performance

A novel adaptive robust tracking control scheme is proposed for a class of single-degree-of-freedom (1DOF) electrostatic micro-actuator systems in the presence of parasitics, parameter uncertainties and external disturbances. This method integrates the adaptive dynamic surface control and H-infinity control techniques. Based on this method, both the design procedure and the derived tracking controller itself are simplified, and the controller guarantees that the output tracking error satisfies the H-infinity tracking performance. In addition, the tracking accuracy can be adjusted by an appropriate choice of the design parameters of the controller. Simulation results show that prescribed transient output tracking performance can be achieved, and the closed-loop system exhibits good robustness to system uncertainties.