Design of a robust controller and modeling aspects of a micro cantilever beam with fringing and squeezed gas film damping effects

In this study, the modeling and control design aspects of a micro cantilever beam (μCB) with fringing and squeezed thin film damping effects are presented. The suspended clamped-free μCB can move via the application of an external electrically induced force. The nonlinear model of the μCB is linearized in multiple operating points with respect to the beam’s displacement. A robust H∞-controller relying on the LMI-theory is designed for the set of the resulting multiple linearized submodels. Particular attention is paid in order to examine the stability issue within the intervals of the operating points. Various test cases are presented in this article, in order to investigate the efficacy of the suggested modeling and control techniques.