Single-mode optical waveguides fabricated in LiNbO3 by multienergy C2+ implantations

Single-mode waveguides in LiNbO3 are demonstrated by use of prism coupling method. The waveguides are fabricated by three different energies and single energy C2+ implantations at the equal total doses, respectively. Dark modes and propagation loss are measured by use of prism coupling and moving fiber methods, respectively. Damages produced by implantation are measured by RBS/channeling technique. The waveguide structures are investigated in two different implantation cases. The results of analysis indicate that the heavy ion-implanted waveguides are still defined by synergetic characteristics from both the raised-index region and the low-index barrier. The broadened barrier from multienergy implantation is demonstrated to play a significant role in reducing propagation loss.