Novel optic-fiber switches based on the wobble-type MEMS electromagnetic microactuator

Some novel optic-fiber switches based on an MEMS electromagnetic microactuator are developed in this paper and their design, fabrication and performance are described. A new kind of wobble-type MEMS electromagnetic microactuator is successfully developed, which can drive mirrors to enter or leave the optical path of a switch. It is layered, composed of two stators and one wobble disc, which improve the output torque of the actuator. Finally, 1×2, 2×2, 1×4 and 1×8 single mode optic-fiber switches, which have been fabricated, are measured. The operating voltage is less than 8 V, switching time is less than 5 ms, insertion loss is less than 0.8 dB, crosstalk is 60 dB, and extinction ratio is 60 dB. These optic-fiber switches show a promising future in optical fiber communication systems.