Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: Robustness enhancement

A high reflectivity and polarization selective high contrast grating mirror has been designed with the use of an automated optimization algorithm. Through a precise study of the tolerance of the different lengths of the structure, the robustness with respect to the fabrication errors has been enhanced to high tolerance values between 5% and 210%. This adjustment of the dimensions of the structure leads to a 250 nm large bandwidth mirror well adapted for a VCSEL application at λ=2.65μm and can easily be scaled for other wavelengths.

► High reflectivity and polarization selective mirror.
► High contrast grating mirror for VCSEL application.
► High contrast grating design with large fabrication tolerances.