Beam delivery system with a non-digitized diffractive beam splitter for laser-drilling of silicon

• We demonstrate a beam-delivery system for laser-drilling of silicon.
• The system allows the fine tuning of the focal length for precise beam delivery.
• The achieved beam positioning accuracy is within 5 μm for a 12-mm-wide beam array.
• The scheme works for a variety of laser applications that require a parallel process.

We report a beam-delivery system consisting of a non-digitized diffractive beam splitter and a Fourier transform lens. The system is applied to the deep-drilling of silicon using a nanosecond pulse laser in the manufacture of inkjet printer heads. In this process, a circularly polarized pulse beam is divided into an array of uniform beams, which are then delivered precisely to the process points. To meet these requirements, the splitter was designed to be polarization-independent with an efficiency>95%. The optical elements were assembled so as to allow the fine tuning of the effective overall focal length by adjusting the wavefront curvature of the beam. Using the system, a beam alignment accuracy of<5 μm was achieved for a 12-mm-wide beam array and the throughput was substantially improved (10,000 points on a silicon wafer drilled in ~1 min). This beam-delivery scheme works for a variety of laser applications that require parallel processing.