Ultrafast laser ablation characteristics of PZT ceramic: Analysis methods and comparison with metals

We have investigated femtosecond laser (120 fs, 800 nm, 5 kHz) ablation of piezoceramic PZT (Pb[ZrxTi1−x]O3). To test the reliability of used analysis methods, results are compared to ablation of pure nickel. The ablation thresholds are determined to be ≈0.38 J/cm² for PZT and ≈0.13 J/cm² for Ni depending on the number of pulses. For the same irradiation conditions, the ablation rate of PZT is almost 500 nm/pulse at 10 J/cm² which corresponds to nearly five times deeper than the ablation rate obtained for nickel at the same fluence. This work presents also in detail the analysis methods taking into account the Gaussian shape of the beam and the characteristics of a dynamical process (groove or impact effects, focal plane or image plane sample positioning) which can be relevant for industrial applications.

► Calculation methods of femtosecond ablation characteristics are tested.
► A new method of ablation rate calculation from grooves is developed.
► Similar ablation rates can be obtained for static and dynamic machining.
► PZT have higher ablation thresholds and higher ablation rates than nickel.
► Incubation with pulses is more pronounced on PZT than on nickel.