Investigation of a UV-laser generated waveguide in a planar polymer chip using an improved interferometric method

Polymeric integrated-optical waveguides are prepared in a planar polymer chip by UV-laser lithographic methods. The waveguide samples are irradiated by an excimer laser at a wavelength Λ=248 nm with various irradiation parameters (different fluencies and irradiation doses). Mach–Zehnder interferometer is employed and the refractive index depth profiles of the waveguide samples are obtained. This profile covers two regions having exponential and Gaussian shapes. The model field distributions strongly depend on the refractive index of each region. The mode field distribution and the effective mode indices for each region have been calculated on the basis of a theoretical model and the experimentally measured data.

► The polymeric waveguides are fabricated using UV-excimer laser at wavelength 248 nm.
► The refractive index profiles are investigated for planar polymeric waveguides.
► The mode field distribution and the propagation coefficients have been examined.
► The effective indices have been examined.