Subwavelength metrological chracterization by Mueller matrix polarimeter and finite difference time domain method

• Polarimetric response of wire grid polarizer (WGP).
• Subwavelength metrological characterization basically for periodic structure.
• Mueller matrix polarimeter and finite difference time domain approach for subwavelength structures.
• Non-destructive rapid measurement of material on real time.
• Best matching of the measured values and convergence with high accuracy and precision.

Wire grid polarizers (WGP), are sub-wavelength gratings with applications in display projection system due to their compact size, wide field of view and long-term stability. Measurement and testing of these structures are important to optimize their use. This is done by first measuring the Mueller matrix of the WGP using a Mueller matrix polarimeter. Next the finite difference time domain (FDTD) method is used to simulate a similar Mueller matrix thus providing the period and step height of the WGP. This approach may lead to more generic determination of sub-wavelength structures including diffractive optical structures.