Morphology study of femtosecond laser nano-structured borosilicate glass using atomic force microscopy and scanning electron microscopy

The morphology of nano-craters drilled in borosilicate glass by single-shot femtosecond laser ablation has been studied by atomic force microscopy and scanning electron microscopy. The influence of polarization, numerical aperture (NA=0.4 and 0.8) and fluence (3