Laser Beam MicroMachining (LBMM) – A review

• The fundamental understanding of ultrafast laser ablation process has been elucidated.
• Research activities performed with short and ultrashort lasers have been discussed.
• Critical analysis of models used to describe performance of LBMM has been elaborated.

The use of short and ultrashort laser pulses for micromachining application is an emerging technology. Laser Beam MicroMachining (LBMM) has revolutionized many industries by providing innovative solutions in numerous industrial micro-engineering applications. High-intensity short or ultrashort laser pulses are powerful thermal energy source for creating micro-features in wide range of materials. These lasers can precisely ablate various types of materials with little or no collateral damage. An overview of LBMM is given so that we can obtain a current view of capabilities and tradeoffs associated with LBMM of sub-micron size. The fundamental understanding of ultrafast laser ablation process has been elucidated and the various research activities performed with nanosecond, picosecond and femtosecond, lasers have been discussed to understand the physical mechanisms and the critical experimental parameters involved in the LBMM. The critical analysis of various theoretical and experimental models used to describe the performance analysis of LBMM has been elaborated so that we can identify the relevant principles underlying the process.