Micro/submicro grating fabrication on metals for deformation measurement based on ultraviolet nanoimprint lithography

We introduce a new route to fabricate micro/submicro gratings on metals for deformation measurement using a simple and low-cost process. The process is based on ultraviolet nanoimprint lithography using a glass slide as a transfer medium and a replication method by strain gage adhesive. Micro/submicro gratings with a protective layer are successfully produced on metals with poor surface flatness. The removal of the protective layer can further extend the application fields of the generated gratings used in moiré methods and geometric phase analysis. As a demonstration, the deformation of an aluminum sample is measured using a fabricated grating.

► We introduce a new route to fabricate gratings on metals for deformation measurement.
► Combination of UV nanoimprint lithography and replication is simple and low-cost.
► Micro/submicro gratings with a protective layer are successfully produced on metals.
► The protective layer can be removed to extend the grating application fields.
► The stress–strain curve of an aluminum sample is measured.