کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
735804 | 1461743 | 2011 | 6 صفحه PDF | دانلود رایگان |
This work presents a unique method for fabricating aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Based on a planetary contour scanning laser machining method along with a shading metal mask and sample movable stage, an array of micro-lenses with precisely controlled surface profiles can be fabricated. Each lens surface profile can be aspheric and pre-designed. Experiments have been carried out and the machining accuracy of each lens surface profile is examined. Good surface roughness and profile accuracy are observed.
► We present a unique method for fabricating aspheric micro-lens array.
► Each lens surface profile can be aspheric and pre-designed.
► Good surface roughness and profile accuracy are observed.
Journal: Optics and Lasers in Engineering - Volume 49, Issues 9–10, September–October 2011, Pages 1232–1237