Micro-motion analyzer used for dynamic MEMS characterization

A computer-controlled micro-motion analyzer (MMA) to study the dynamic behavior of movable structures of MEMS is described in this paper. It employs two optical nondestructive methods—computer microvision for in-plane motion measurement and phase-shifting interferometry for out-of-plane motion measurement. This fully integrated system includes a high-performance imaging system, drive electronics, data acquisition and data analysis software. This system can freeze the fast motions of MEMS devices using strobed illumination and measure motions in three dimensions with nanometer accuracy. The static measurement accuracy and repeatability of the system is calibrated by a step height standard which is certified by National Institute of Standards and Technology (NIST). The capabilities of this system are illustrated with a study of the dynamic behaviors of a surface micromachined polysilicon micro-resonator.