کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
735927 | 893684 | 2008 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Geometrical characterization techniques for microlens made by thermal reflow of photoresist cylinder
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Geometrical characterization techniques for microlens made by thermal reflow of photoresist cylinder Geometrical characterization techniques for microlens made by thermal reflow of photoresist cylinder](/preview/png/735927.png)
چکیده انگلیسی
Microlens characterization is a prerequisite for improving fabrication process, and for satisfying the end user needs. In this paper we explore techniques to characterize geometrical properties of microlens made by thermal reflow: viz. microlens profile; radius of curvature; microlens height; contact angle and focal length. The geometrical characterization is done using techniques such as contact profilometry, scanning electron microscopy (SEM), optical microscopy, white light confocal microscopy and fluorescence confocal microscopy. All the above techniques are studied and compared, keeping in mind the characterization requirements of polymer microlens made by thermal reflow technique.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics and Lasers in Engineering - Volume 46, Issue 10, October 2008, Pages 711–720
Journal: Optics and Lasers in Engineering - Volume 46, Issue 10, October 2008, Pages 711–720
نویسندگان
Mohammed Ashraf, Cherry Gupta, Franck Chollet, Stuart Victor Springham, Rajdeep Singh Rawat,