The measurement of the diameter change of a piezoelectric transducer cylinder with the white-light interferometry

• In this paper we present a white-light interferometric method for the measurement of the diameter change of a PZT cylinder.
• The phase change of the interferogram of the MZI is used to determine the diameter change when a DC voltage is applied on the PZT cylinder.
• The Fourier transform white-light interferometry is used for recovering the phase change of the interferometer.
• The proposed method possesses the abilities to provide wide dynamic measurement range.

The measurement of the diameter change of a piezoelectric transducer (PZT) cylinder with the white-light interferometry is proposed and experimentally demonstrated. One arm of a Mach–Zehnder interferometer (MZI) is wrapped on the PZT cylinder, and the phase change of the interferogram of the MZI is used to determine the diameter change when a DC voltage is applied on the PZT cylinder. The Fourier transform white-light interferometry is used for recovering the phase change of the interferometer. The experimental results show that the diameter change resolution of 0.8 nm for the PZT cylinder with diameter of 40 mm is achieved.