کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
736019 | 893701 | 2006 | 16 صفحه PDF | دانلود رایگان |
In this work, we present the experimental results of micromachining into polymethy-methacrylate exposed to oblique KrF excimer laser beams. The results of low-aspect-ratio ablations show that the ablation rate decreases monotonously with the increase of incident angle for various fluences. The ablation rate of high-aspect-ratio drilling with opening center on the focal plane is almost independent of incident angles and is less than that of low-aspect-ratio ablation. The results of high-aspect-ratio ablations show that the openings of the holes at a distance from the focal plane are enlarged and their edges are blurred. Besides, the depth of a hole in the samples oblique to the laser beam at a distance from the focal plane decreases with the increase of the distance from the focal plane. The number of deep holes generated by oblique laser beams through a matrix of apertures decreases with the increase of incident angle. Those phenomena reveal the influence of the local light intensity on microdrilling into an oblique surface.
Journal: Optics and Lasers in Engineering - Volume 44, Issue 8, August 2006, Pages 842–857