کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
736049 | 893705 | 2006 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Correction of a coherent image during KrF excimer laser ablation using a mask projection
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
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چکیده انگلیسی
Using masks for laser ablation has proven useful in the fabrication of prototypes for the manufacturing of micro-fluidic devices. In this work, an excimer laser was used to engrave microscopic channels on the surface of polyethylene terephthalate (PET), which showed a high absorption ratio for an excimer laser beam with a wavelength of 248 nm. When 50 μm wide rectangular microscopic channels were made using a 500Ã500 μm square mask and a magnification ratio of 1/10, ditch-shaped defects were found at both corners. The calculation of the laser beam intensity showed that a coherent image in the PET specimen caused the defects. An analysis based on the Fourier diffraction theory enabled the prediction of a coherent shape at the image plane, as well as a diffracted beam between the mask and the image plane. The analysis also showed that the diameter of the aperture was a predominant factor toward the elimination of ditch-shaped defects in the rectangular microscopic channels on the PET produced by an excimer laser ablation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics and Lasers in Engineering - Volume 44, Issue 6, June 2006, Pages 615-622
Journal: Optics and Lasers in Engineering - Volume 44, Issue 6, June 2006, Pages 615-622
نویسندگان
Dong Sig Shin, Jae Hoon Lee, Jeong Suh, To Hoon Kim,