Energy accumulation effect and parameter optimization for fabricating of high-uniform and large-area period surface structures induced by femtosecond pulsed laser

In this paper, theoretical and experimental investigations are performed to understand the effect of laser energy accumulation on morphologies of femtosecond laser-induced periodic surface structures (LIPSSs). Based on energy accumulation effect we put forward, scanning velocity, distance of two adjacent scan lines and pulsed laser energy density are optimized to fabricate high-uniform and large-area period surface structures for the first time. Our theoretical results can offer clues to choose experiment parameters in order to obtain high-quality LIPSSs which have extensively emerging and potential applications in optoelectronics, phononics and so on.