کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
736452 | 893866 | 2011 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si](/preview/png/736452.png)
چکیده انگلیسی
In this paper, the fabrication and characterization of a novel magnetoelectric multiferroic (Dy modified BiFeO3 or BDFO) MEMS cantilevers fabricated directly on Si have been reported for the first time ever. The functioning of BDFO microcantilevers has been tested in the presence of electric field as well as magnetic field. The transverse piezoelectric coefficients d31 and e31 of the BDFO films measured from the deflection of the cantilever under applied voltage were −40 pm/V and −5.63 C/m2 respectively. The piezoelectric properties of BDFO films are similar to that reported for lead zirconate titanate (PZT), while offering additional flexibility in designing and operating MEMS devices.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 166, Issue 1, March 2011, Pages 83–87
Journal: Sensors and Actuators A: Physical - Volume 166, Issue 1, March 2011, Pages 83–87
نویسندگان
K. Prashanthi, M. Mandal, S.P. Duttagupta, R. Pinto, V.R. Palkar,