کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
736574 893878 2010 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A new Finite Element approach for studying the effect of surface stress on microstructures
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
A new Finite Element approach for studying the effect of surface stress on microstructures
چکیده انگلیسی

The traditional Finite Element Method, when applied to the micro- and nanoscale, lacks of contemplating stress on surfaces. In macroscopic mechanics, stress is a prerogative of bulks as displayed by the standard form of Principle of Virtual Work (PVW). On the other hand, the progressive increase of surface/volume ratio that occurs moving from macro- to micro- and nano-structures imposes to FE method to change accordingly, thus including surface stresses too in the underlying equations.In this paper a new FE approach is proposed, based on the modification of the PVW with a term representing the work of surface deformation. The addition of such a contribution to the standard PVW allows a straightforward analysis of the effect of surface stress on microcantilevers, probably one of the most important current issues related to MEMSs (Micro-Electro-Mechanical Systems) and BioMEMSs (Biological Micro-Electro-Mechanical Systems). Both static and dynamic aspects have been worked out and the benchmarks with the theoretical and experimental results available in literature confirm the correctness of the proceeding.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 159, Issue 2, May 2010, Pages 141–148
نویسندگان
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