Cylindrical ultrasonic linear microactuator based on quasi-traveling wave propagation on a thin film metallic glass pipe supported by a piezoelectric ceramic tube

A novel ultrasonic linear microactuator with a circular cylindrical stator and slider structure is presented. The stator consists of a cylindrical piezoelectric ceramic tube and an elastic material, a thin film metallic glass (TFMG) pipe. In finite element simulations, a quasi-traveling wave is generated on the TFMG pipe, and trajectories of particles on the pipe are determined to be elliptical motion. There is good agreement between the simulations and measurement results for the vibration of the fabricated stator. Bi-directional motion of the slider is successfully observed at 613 kHz, and the maximum velocity is about 25 mm/s at 30 V.