A resonant CMUT-based fluid sensor: Modeling and simulation

Fluid waves at the interface of Capacitive Micromachined Ultrasound Transducers (CMUTs) to the surrounding fluid are an often discussed and unwanted effect for medical applications, as they cause crosstalk between neighboring membranes. A new approach is presented which uses these dispersive surface waves for sensing fluid properties like density and viscosity. The paper describes the sensor principle, the FEM modeling and discusses first simulation results.