Ag-TiNx electrodes deposited on piezoelectric poly(vinylidene fluoride) for biomedical sensor applications

• Ag-TiNx thin films were deposited by sputtering on piezoelectric PVDF.
• Deposition conditions did not damage the polymeric substrate.
• SEM images revealed Ag nanoparticles segregated from the TiN cubic grain boundaries.
• The deposited films as suitable for the development of functional electrodes.

Electroactive polymers are one of the most interesting class of polymers used as smart materials in various applications, such as the development of sensors and actuators for biomedical applications in areas such as smart prosthesis, implantable biosensors and biomechanical signal monitoring, among others. For acquiring or applying the electrical signal from/to the piezoelectric material, suitable electrodes can be produced from Ti based coatings with tailored multifunctional properties, e.g., electrical conductivity and antibacterial characteristics, through Ag inclusions. TiN is a good candidate for this application since it is electrically conductive and shows superior chemical stability in relation to pure Ti, being also biocompatible.